先进封装与系统集成解决方案

SCI

Copper Pillar Bump Flow

Solder Bump Flow

Item 2025-HVM 2025-NPI 2026-HVM 2027-HVM
Tech Node 5nm 5nm 5nm 3nm
Wafer Size(Inch) 8&12 8&12 8&12 8&12
Wafer Type Silicon Silicon Silicon,Glass carrier Silicon,Glass carrier
Notch Type Notch Notch Notch,Flat Notch,Flat
Mask Layer 3P3M 3P3M 4P4M 4P4M
I/O Pin Count(Die) 40000 >45000
Bump Structure Copper Pillar Cu/Ni/SnAg Cu/Ni/SnAg Cu/Ni/Cu/SnAg
Solder Bump Cu/Ni/SnAg Cu/SnAg Cu/Ni/SnAg Cu/SnAg
Ball Mount Cu/SnAg Cu/SnAg
Min. Bump Pitch
/Min. Bump Size
Copper Pillar 80/40µm 60/30µm 45/25µm 45/25µm
Solder Bump 120/80µm 100/65µm 90/45µm 90/45µm
Ball Mount 350/225µm 300/150µm
Max. Bump Height Copper Pillar 110µm 110µm 110µm
Solder Bump 85µm 95µm 95µm
RDL Process RDL Material Cu(+Ni/Pd/Au) Cu(+Ni/Pd/Au) Cu(+Ni/Pd/Au)
Min. RDL L/S 8/8µm 6/6µm 4/4µm
Max. RDL THK 10µm 12µm 12µm