先进封装与系统集成解决方案

Copper Pillar Bump Flow

Plating Solder Bump Flow

DPS Flow

Item 2026-HVM 2026-NPI 2027-HVM 2028-HVM
Tech Node 5nm 5nm 4nm 3nm
Wafer Size(Inch) 8&12 8&12 8&12 8&12
Wafer Type Silicon Silicon,Glass carrier Silicon,Glass carrier Silicon,Glass carrier
Notch Type Notch Notch Notch Notch
Mask Layer 3P3M 4P4M 4P4M 5P5M
I/O Pin Count(Die) 40000 >45000
Bump Structure Copper Pillar Bump Cu/Ni/SnAg Cu/Ni/SnAg
Plating Solder Bump Cu/Ni/SnAg Cu/SnAg Cu/Ni/SnAg Cu/SnAg
Ball Mount Cu/SnAg Cu/SnAg
Min.Bump Pitch
/Min.Bump Size
Copper Pillar Bump 60/40μm 50/30μm 45/25μm 40/20μm
Plating Solder Bump 100/65 μm 90/45μm 90/45μm 80/40μm
Ball Mount 350/225μm 300/150μm
Max.Bump Height Copper Pillar Bump 110μm 110μm 110μm
Plating Solder Bump 85μm 95μm 95μm
RDL Process RDL Material Cu,Cu/Ni/Au,Cu/Ni/Pd/Au Cu,Cu/Ni/Au,Cu/Ni/Pd/Au Cu,Cu/Ni/Au,Cu/Ni/Pd/Au
Min.RDL L/S 6/6μm 5/5μm 4/4μm
Max. RDL THK 10 μm 12 μm 12μm